Fabrication of resonant subwavelength grating based on thiol-ene

Man Zhang; Qiling Deng; Lifang Shi; Zhiwei Li; Hui Pang; Yukun Zhang; Jinqing Yu; Song Hu

doi:10.1117/12.2068526

21 August 2014 Fabrication of resonant subwavelength grating based on thiol-ene

Man Zhang, Qiling Deng, Lifang Shi, Zhiwei Li, Hui Pang, Yukun Zhang, Jinqing Yu, Song Hu

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 92830R (2014) https://doi.org/10.1117/12.2068526
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

This paper presents an approach used to fabricate resonant subwavelength grating based on thiol-ene material. First of all, polydimethylsiloxane soft imprint stamp with opposite structure of the subwavelength grating master mold is made by casting. Then, the desired subwavelength grating with UV-curable thiol-ene material grating structure is fabricated using the polydimethylsioxane soft stamp by UV-curable soft-lithography. Here, we fabricate a subwavelength grating with period of 300nm using the approach, which could reflect blue light with wavelength ranging from 448nm to 482nm at a specific angle and presents the excellent resonant characteristic. The experimental results are consistent with the simulation results, demonstrating that the approach proposed in this paper could effectively fabricate the thiol-ene material resonant subwavelength grating structure. The thiol-ene material is a new green UV-curable polymer material, including a number of advantages such as rapid UV-curing in the natural environment, low-cost, high resolution, and regulative performance characteristic. The fabrication technique in this paper is simple, low-cost, and easy to high throughput, which has broad application prospects in the preparation of micro and nano structures.

Citation Download Citation

Man Zhang, Qiling Deng, Lifang Shi, Zhiwei Li, Hui Pang, Yukun Zhang, Jinqing Yu, and Song Hu "Fabrication of resonant subwavelength grating based on thiol-ene", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 92830R (21 August 2014); https://doi.org/10.1117/12.2068526

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