Photo-induced large-scale circular surface-relief diffraction gratings on azo-glass

James Leibold; Ribal Georges Sabat

doi:10.1117/12.2076368

19 March 2015 Photo-induced large-scale circular surface-relief diffraction gratings on azo-glass

James Leibold, Ribal Georges Sabat

Proceedings Volume 9423, Alternative Lithographic Technologies VII; 94231V (2015) https://doi.org/10.1117/12.2076368
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

Novel metallic light-interfering fixtures were designed and fabricated in order to achieve a laser interference pattern of constant-pitch, concentric and sinusoidal light variations. These fixtures consisted of annular rings with the inner diameter shaped conically. Azobenzene-containing solid thin-films were subsequently placed behind the fixture and circular surface-relief diffraction gratings were inscribed due to the azo molecules photochemical isomerization process. Gratings pitches were dependent on the fixture dimensions and ranged from 600 to 1400 nm with depths up to 250 nm.

Citation Download Citation

James Leibold and Ribal Georges Sabat "Photo-induced large-scale circular surface-relief diffraction gratings on azo-glass", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94231V (19 March 2015); https://doi.org/10.1117/12.2076368

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