Method for interferometric testing of optical surfaces based on evaluation of similarity of nominal and measured interferograms

Petr Pokorny; Jiri Novak; Pavel Novak; Antonin Mikš

doi:10.1117/12.2083902

7 January 2015 Method for interferometric testing of optical surfaces based on evaluation of similarity of nominal and measured interferograms

Petr Pokorny, Jiri Novak, Pavel Novak, Antonin Mikš

Author Affiliations +

Proceedings Volume 9442, Optics and Measurement Conference 2014; 944211 (2015) https://doi.org/10.1117/12.2083902
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

This work describes and analyzes a method for an evaluation of interferometric testing of optical surfaces, which is based on evaluation of similarity between the interferogram of the tested surface and the virtual interferogram of the nominal surface. The evaluation process is described as an optimization problem and the correlation coefficient between both interferograms is used as a merit function. The performance of the method is presented on examples of testing optical surfaces.

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Petr Pokorny, Jiri Novak, Pavel Novak, and Antonin Mikš "Method for interferometric testing of optical surfaces based on evaluation of similarity of nominal and measured interferograms", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944211 (7 January 2015); https://doi.org/10.1117/12.2083902

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