SMI: a new method to allow low cost, high resolution micro-machining using UV solid state lasers

David Milne; David Myles; Phil Rumsby

doi:10.1117/12.2182410

1 July 2015 SMI: a new method to allow low cost, high resolution micro-machining using UV solid state lasers

David Milne, David Myles, Phil Rumsby

Proceedings Volume 9657, Industrial Laser Applications Symposium (ILAS 2015); 96570F (2015) https://doi.org/10.1117/12.2182410
Event: Industrial Laser Applications Symposium 2015, 2015, Kenilworth, United Kingdom

Abstract

A new solid state laser based mask projection technique for micro-structuring materials is introduced and results obtained with a pilot system are shown. Details of the proposed architecture of production tools using the new technology are given. Advantages of the new method over conventional excimer laser based mask projection systems are summarized.

Citation Download Citation

David Milne, David Myles, and Phil Rumsby "SMI: a new method to allow low cost, high resolution micro-machining using UV solid state lasers", Proc. SPIE 9657, Industrial Laser Applications Symposium (ILAS 2015), 96570F (1 July 2015); https://doi.org/10.1117/12.2182410

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