Study on optical fabrication and metrology of precise convex aspheric mirror

Huijun Wang; Jin Xu; Peng Wang; Ang Li; Wen Guo; Yan Du

doi:10.1117/12.2242636

28 October 2016 Study on optical fabrication and metrology of precise convex aspheric mirror

Huijun Wang, Jin Xu, Peng Wang, Ang Li, Wen Guo, Yan Du

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96830M (2016) https://doi.org/10.1117/12.2242636
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Optical fabrication and metrology technologies are studied in the paper to improve the accuracy of surface figure of a convex aspheric mirror. First, the main specifications of a convex aspheric mirror which is chosen to be the secondary mirror of an optical system are presented. The aperture of the mirror is 400mm. The mirror is made of ultra-low expansion (ULE) glass with honeycomb sandwich structure to get the ideal lightweight requirement. Then the mirror is surfaced by ultrasonic grinding, smart robot lapping and smart robot polishing processes relatively. Large-apertured tool is applied to reduce the mid-frequency surface error. Both the contour measuring method in the grinding and lapping stage and the measuring method with meniscus lens and its calibration mirror in the polishing stage are studied. The final surface figure of the mirror is that the root mean-square value (RMS value) is 0.016λ (λ=632.8nm), which meets the requirement of the optical system. The results show that the forging surfacing processes and measuring methods are accurate and efficient to fabricate the convex aspheric mirror and can be applied in optical fabrication for larger-apertured convex aspheric mirrors.

Citation Download Citation

Huijun Wang, Jin Xu, Peng Wang, Ang Li, Wen Guo, and Yan Du "Study on optical fabrication and metrology of precise convex aspheric mirror", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96830M (28 October 2016); https://doi.org/10.1117/12.2242636

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