Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters

Lichao Xu; Yongjian Wan; Haitao Liu; Jia Wang

doi:10.1117/12.2243613

28 October 2016 Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters

Lichao Xu, Yongjian Wan, Haitao Liu, Jia Wang

Author Affiliations +

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96831W (2016) https://doi.org/10.1117/12.2243613
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Smoothing is a convenient and efficient way to restrain middle spatial frequency (MSF) errors. Based on the experience, lap diameter, rotation speed, lap pressure and the hardness of pitch layer are important to correcting MSF errors. Therefore, nine groups of experiments are designed with the orthogonal method to confirm the significance of the above parameters. Based on the Zhang’s model, PV (Peak and Valley) and RMS (Root Mean Square) versus processing cycles are analyzed before and after smoothing. At the same time, the smoothing limit and smoothing rate for different parameters to correct MSF errors are analyzed. Combined with the deviation analysis, we distinguish between dominant and subordinate parameters, and find out the optimal combination and law of various parameters, so as to guide the further research and fabrication.

Citation Download Citation

Lichao Xu, Yongjian Wan, Haitao Liu, and Jia Wang "Performance evaluation of pitch lap in correcting mid-spatial-frequency errors under different smoothing parameters ", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831W (28 October 2016); https://doi.org/10.1117/12.2243613

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