Development and analysis of new type microresonator with electro-optic feedback

Giedrius Janusas; Arvydas Palevicius; Elingas Cekas; Alfredas Brunius; Jokubas Bauce

doi:10.1117/12.2228789

27 April 2016 Development and analysis of new type microresonator with electro-optic feedback

Giedrius Janusas, Arvydas Palevicius, Elingas Cekas, Alfredas Brunius, Jokubas Bauce

Proceedings Volume 9889, Optical Modelling and Design IV; 98891N (2016) https://doi.org/10.1117/12.2228789
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.

Citation Download Citation

Giedrius Janusas, Arvydas Palevicius, Elingas Cekas, Alfredas Brunius, and Jokubas Bauce "Development and analysis of new type microresonator with electro-optic feedback", Proc. SPIE 9889, Optical Modelling and Design IV, 98891N (27 April 2016); https://doi.org/10.1117/12.2228789

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