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A two-stage adaptive optical system using four piezoelectric deformable mirrors was constructed at SPring-8 to form
collimated X-ray beams. The deformable mirrors were finely deformed to target shapes (elliptical for the upstream mirrors
and parabolic for the downstream mirrors) based on shape data measured with the X-ray pencil beam scanning method.
Ultraprecise control of the mirror shapes enables us to obtain various collimated beams with different beam sizes of 314
μm (358 μm) and 127 μm (65 μm) in the horizontal (vertical) directions, respectively, with parallelism accuracy of ~ 1
μrad rms.
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T. Goto, S. Matsuyama, H. Nakamori, H. Hayashi, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi, "Size-changeable x-ray beam collimation using an adaptive x-ray optical system based on four deformable mirrors," Proc. SPIE 9965, Adaptive X-Ray Optics IV, 996502 (27 October 2016); https://doi.org/10.1117/12.2238794