Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror

Lisa A. Poyneer; Jaime Ruz Armendariz; Jun Feng; Weilun Chao; Jessie Jackson; James Nasiatka; Todd Decker

doi:10.1117/12.2236568

9 September 2016 Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror

Lisa A. Poyneer, Jaime Ruz Armendariz, Jun Feng, Weilun Chao, Jessie Jackson, James Nasiatka, Todd Decker

Proceedings Volume 9965, Adaptive X-Ray Optics IV; 99650G (2016) https://doi.org/10.1117/12.2236568
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

Our experiments at beamline 5.3.1 of the Advanced Light Source feature a 45-cm long x-ray deformable mirror (XDM). We describe the experiment and present recent results in two areas. First, we directly image the 3 keV x-ray beam and demonstrate customized shaping of its intensity in the near field. Detailed physics simulations of the experiment agree very well with actual measurements. Second, we use a grating interferometer to measure known figure errors applied to the surface of the XDM. A relative height change on the XDM of 2.5 nm RMS is measured at an SNR of eight in single measurement. A provisional error budget analysis indicates that uncalibrated errors in the system are by far the largest component.

Citation Download Citation

Lisa A. Poyneer, Jaime Ruz Armendariz, Jun Feng, Weilun Chao, Jessie Jackson, James Nasiatka, and Todd Decker "Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror", Proc. SPIE 9965, Adaptive X-Ray Optics IV, 99650G (9 September 2016); https://doi.org/10.1117/12.2236568

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