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7 March 2022 Thermal linewidth of a MEMS tunable VCSEL
Bart C. Johnson, Joey Jabbour, Mark Malonson, Seungbum Woo, Ed Mallon, Nate Kemp, Peter Whitney
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Proceedings Volume PC11948, Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XXVI; PC119480N (2022) https://doi.org/10.1117/12.2610028
Event: SPIE BiOS, 2022, San Francisco, California, United States
Abstract
The flexible membranes used in MEMS tunable VCSELs are so small and light that thermally-induced vibrations can impact performance. We measure the thermal vibration spectrum of such a membrane showing peaks at the spatial vibration mode resonant frequencies of the membrane/plate. These vibrations result in a theoretical floor to the linewidth of the VCSEL. Frequency domain LiDAR and optical coherence tomography systems can get around this thermal linewidth limit with adequate clock measurement and processing. Essentially an OCT/LiDAR sweep with a concomitantly measured clock is a feed-forward linewidth reduction scheme. LiDAR ranging out to 10 meters has been demonstrated.
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Bart C. Johnson, Joey Jabbour, Mark Malonson, Seungbum Woo, Ed Mallon, Nate Kemp, and Peter Whitney "Thermal linewidth of a MEMS tunable VCSEL", Proc. SPIE PC11948, Optical Coherence Tomography and Coherence Domain Optical Methods in Biomedicine XXVI, PC119480N (7 March 2022); https://doi.org/10.1117/12.2610028
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KEYWORDS
Vertical cavity surface emitting lasers
Microelectromechanical systems
Clocks
LIDAR
Optical coherence tomography
Ranging
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