Addressing thermal effects during ultrashort pulse laser micro-machining with flexible energy deposition on wide timescales

Axel Fehrenbacher; Marc Sailer; Steffen Ruebling; Ulf Quentin; Aleksander Budnicki; Yidong Zhou

doi:10.1117/12.2609624

1 April 2022 Addressing thermal effects during ultrashort pulse laser micro-machining with flexible energy deposition on wide timescales

Axel Fehrenbacher, Marc Sailer, Steffen Ruebling, Ulf Quentin, Aleksander Budnicki, Yidong Zhou

Author Affiliations +

Proceedings Volume PC11989, Laser-based Micro- and Nanoprocessing XVI; PC1198909 (2022) https://doi.org/10.1117/12.2609624
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

In this contribution we focus on micro-machining of several materials in different processing regimes. The temporal energy deposition is influenced during operation on a femto- up to a microsecond timescale. Using an off-axis microscope, we present camera image sequences automatically obtained during the ablation process, capturing the surface changes during machining, and revealing spatially and temporally resolved developments. This aids in further process understanding such as parameter dependencies and critical process regimes (formation of unwanted surface morphologies). To optimize both productivity and quality, combined processes with successive parameter sequences are demonstrated, enabled by fast and controlled intra-process pulse parameter switching.

Conference Presentation

Citation Download Citation

Axel Fehrenbacher, Marc Sailer, Steffen Ruebling, Ulf Quentin, Aleksander Budnicki, and Yidong Zhou "Addressing thermal effects during ultrashort pulse laser micro-machining with flexible energy deposition on wide timescales", Proc. SPIE PC11989, Laser-based Micro- and Nanoprocessing XVI, PC1198909 (1 April 2022); https://doi.org/10.1117/12.2609624

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