Examination of silicon diffusion in GaN

Malgorzata Iwinska; Pawel Prystawko; Andrzej Taube; Kacper Sierakowski; Rafal Jakiela; Michal Bockowski

doi:10.1117/12.2607583

5 March 2022 Examination of silicon diffusion in GaN

Malgorzata Iwinska, Pawel Prystawko, Andrzej Taube, Kacper Sierakowski, Rafal Jakiela, Michal Bockowski

Proceedings Volume PC12001, Gallium Nitride Materials and Devices XVII; PC1200107 (2022) https://doi.org/10.1117/12.2607583
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Silicon diffusion process was investigated in GaN layers crystallized by metal-organic vapor phase epitaxy (MOVPE) on native ammonothermal substrates of the highest structural quality. N-type (Si-doped) and p-type (Mg-doped) layers were implanted with Si and treated with ultra-high-pressure annealing. The morphology of the layers was examined at each step by optical microscopy and atomic force microscopy. The crystallographic structure was evaluated by X-ray diffraction measurements. The diffusion of Si was analyzed basing on depth profiles from secondary ion mass spectrometry. Temperature-dependent diffusion coefficients, pre-exponential factors, and activation energies for Si diffusion in n-type and p-type MOVPE-GaN were determined and compared.

Conference Presentation

Citation Download Citation

Malgorzata Iwinska, Pawel Prystawko, Andrzej Taube, Kacper Sierakowski, Rafal Jakiela, and Michal Bockowski "Examination of silicon diffusion in GaN", Proc. SPIE PC12001, Gallium Nitride Materials and Devices XVII, PC1200107 (5 March 2022); https://doi.org/10.1117/12.2607583

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available