Photoluminescence, electroluminescence, and bias-dependent time-resolved photoluminescence spectroscopies are performed to study the current injection efficiency, internal quantum efficiency, and light external quantum efficiency of 265-nm AlGaN DUV LEDs grown on AlN substrates. The studies showed that the current injection and light extraction efficiencies, and not the internal quantum efficiency, limit the external quantum efficiency. To solve the issue, we revisited the effect of Si-doping in AlN. Our spectroscopic study deduced the significantly lower neutral Si donor bound exciton and Si donor binding energies than those reported, indicating the possibility to realize highly conductive and transparent n-type AlN:Si layers.
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