Design, optimization, and fabrication of optical metasurfaces and metasystems

Amir Arbabi

doi:10.1117/12.2609133

5 March 2022 Design, optimization, and fabrication of optical metasurfaces and metasystems

Amir Arbabi

Proceedings Volume PC12011, High Contrast Metastructures XI; PC120110X (2022) https://doi.org/10.1117/12.2609133
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We present a technique for designing efficient and robust metasurfaces that optimizes the metasurface design curves instead of individual metasurface elements and thus does not suffer from the size limitations of conventional optimization techniques. Spatially varying design curves are parametrized and optimized using the grating averaging technique. We present simulation and experimental results of highly efficient metasurface beam deflectors and lenses that are robust to fabrication errors. In particular, we present an 80° beam deflector with absolute efficiency of 75% and a metalens with NA of 0.8 and an efficiency of 86% that is robust to fabrication errors.

Conference Presentation

Citation Download Citation

Amir Arbabi "Design, optimization, and fabrication of optical metasurfaces and metasystems", Proc. SPIE PC12011, High Contrast Metastructures XI, PC120110X (5 March 2022); https://doi.org/10.1117/12.2609133

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