Aluminum-based millimeter-wave kinetic inductance detectors on 150~mm diameter substrates

Jason E. Austermann; James Beall; Jiansong Gao; Johannes Hubmayr; Joel Ullom; Michael Vissers; Jordan Wheeler

doi:10.1117/12.2630512

29 August 2022 Aluminum-based millimeter-wave kinetic inductance detectors on 150~mm diameter substrates

Jason E. Austermann, James Beall, Jiansong Gao, Johannes Hubmayr, Joel Ullom, Michael Vissers, Jordan Wheeler

Proceedings Volume PC12190, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI; PC121900X (2022) https://doi.org/10.1117/12.2630512
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

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Jason E. Austermann, James Beall, Jiansong Gao, Johannes Hubmayr, Joel Ullom, Michael Vissers, and Jordan Wheeler "Aluminum-based millimeter-wave kinetic inductance detectors on 150~mm diameter substrates", Proc. SPIE PC12190, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI, PC121900X (29 August 2022); https://doi.org/10.1117/12.2630512

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