CCAT-prime: Prototype Submillimeter-wave Aluminum Kinetic Inductance Detectors Fabricated with Electron-beam Lithography

Yaqiong Li

doi:10.1117/12.2630465

29 August 2022 CCAT-prime: Prototype Submillimeter-wave Aluminum Kinetic Inductance Detectors Fabricated with Electron-beam Lithography

Yaqiong Li

Author Affiliations +

Proceedings Volume PC12190, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI; PC1219018 (2022) https://doi.org/10.1117/12.2630465
Event: SPIE Astronomical Telescopes + Instrumentation, 2022, Montréal, Québec, Canada

Conference Poster

Abstract

This conference presentation was prepared for the Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI conference at SPIE Astronomical Telescopes + Instrumentation, 2022.

Citation Download Citation

Yaqiong Li "CCAT-prime: Prototype Submillimeter-wave Aluminum Kinetic Inductance Detectors Fabricated with Electron-beam Lithography", Proc. SPIE PC12190, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI, PC1219018 (29 August 2022); https://doi.org/10.1117/12.2630465

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