Integrated photonic sensors can provide large scale, flexible detection schemes. We present the development of sensitive nanoscale ultrasound sensors, compatible with Silicon-based photonic integrated circuits (PICs). The ability to measure ultrasound has many applications, ranging from biomedical imaging to non-destructive testing. These miniaturized sensors offer wideband, sensitive ultrasound detection by exploiting the photoelastic effect at the sensor interface. We will discuss challenges and opportunities in PIC integration, and our progress towards all-optical sensor arrays. These sensors enable sensitive compact ultrasound detectors for photoacoustic-based diagnostics, tissue monitoring, and compact lab-on-a-chip bio-sensing systems.
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