ScAlN integrated quantum photonics

Zetian Mi

doi:10.1117/12.2646611

17 March 2023 ScAlN integrated quantum photonics

Zetian Mi

Author Affiliations +

Proceedings Volume PC12430, Quantum Sensing and Nano Electronics and Photonics XIX; PC1243001 (2023) https://doi.org/10.1117/12.2646611
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Recent studies have shown that the incorporation of scandium (Sc) can transform AlN to be ferroelectric. The resulting ferroelectric ScAlN exhibits significantly enhanced electrical, piezoelectric, as well as linear and nonlinear optical properties. These unique characteristics, together with its ultrawide bandgap, ferroelectric functionality, and seamless integration with III-nitride technology, have made ScAlN a very promising platform for future integrated quantum photonics. Here, we report on the epitaxy of single crystalline ferroelectric ScAlN and the demonstration of ScAlN waveguides, ring resonators, and modulators, which offer, for the first time, the ability to truly unlock the potential of this material system.

Conference Presentation

Citation Download Citation

Zetian Mi "ScAlN integrated quantum photonics", Proc. SPIE PC12430, Quantum Sensing and Nano Electronics and Photonics XIX, PC1243001 (17 March 2023); https://doi.org/10.1117/12.2646611

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