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28 April 2023 Shielded stretchable capacitive force sensors with liquid metal channels
Bekir Aksoy, Krishna Manaswi Digumarti, Giulio Grasso, Vito Cacucciolo, Herbert R. Shea
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Proceedings Volume PC12482, Electroactive Polymer Actuators and Devices (EAPAD) XXV; PC124820I (2023) https://doi.org/10.1117/12.2661665
Event: SPIE Smart Structures + Nondestructive Evaluation, 2023, Long Beach, California, United States
Abstract
We report electrically shielded capacitive stretchable force sensors, that simultaneously measure normal and shear strains, even near electric sparks. The device consists of an outer conductive stretchable shielding layer (carbon-loaded silicone) and a central silicone layer with embedded air channels and three liquid metal electrodes. We report sub-mN force resolution in both normal and shear directions, can measure forces larger than 10 N, and operate reliably after repeated loading to 20 N load. Performance is unaffected by nearby high DC and AC electric fields, allowing use in a wide range of robotic sensing applications.
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Bekir Aksoy, Krishna Manaswi Digumarti, Giulio Grasso, Vito Cacucciolo, and Herbert R. Shea "Shielded stretchable capacitive force sensors with liquid metal channels", Proc. SPIE PC12482, Electroactive Polymer Actuators and Devices (EAPAD) XXV, PC124820I (28 April 2023); https://doi.org/10.1117/12.2661665
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KEYWORDS
Sensors
Liquids
Metals
Electrodes
Silicon
Capacitors
Electric field sensors
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