Author Affiliations +
Erik Geiss,1 Massud Aminpur,1 Ryan Sporer,1 Vijayalakshmi Seshachalam,1 Padraig R. Timoney,1 Brendan O'Brien,1 Josh LaRose,2 Eitan Barlaz,2 Cameron Werner,2 Katie Lutker-Lee,3 Luis Fernandez,4 Brian Pfeifer,4 Chimaobi Mbanaso,4 Yan Shao,4 Angélique Raley2
1GlobalFoundries (United States)
2Tokyo Electron America (United States)
3Tokyo Electron Technology Ctr. of America (United States)
4Tokyo Electron Manufacturing and Engineering of America (United States)