Spatial frequency breakdown of CD variation

Tatiana Kovalevich

doi:10.1117/12.3012441

26 September 2023 Spatial frequency breakdown of CD variation

Tatiana Kovalevich

Proceedings Volume PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; PC129150D (2023) https://doi.org/10.1117/12.3012441
Event: Photomask Japan 2023, 2023, Online Only

Abstract

This conference presentation was prepared for Photomask Japan 2023.

Conference Presentation

Citation Download Citation

Tatiana Kovalevich "Spatial frequency breakdown of CD variation", Proc. SPIE PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, PC129150D (26 September 2023); https://doi.org/10.1117/12.3012441

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