Miniature photonics devices enabled by metagrating-integrated VCSELs

Mindaugas Juodėnas; Erik Strandberg; Alexander Grabowski; Johan Gustavsson; Hana Šípová-Jungová; Anders Larsson; Mikael Käll

doi:10.1117/12.3016694

11 June 2024 Miniature photonics devices enabled by metagrating-integrated VCSELs

Mindaugas Juodėnas, Erik Strandberg, Alexander Grabowski, Johan Gustavsson, Hana Šípová-Jungová, Anders Larsson, Mikael Käll

Author Affiliations +

Proceedings Volume PC12990, Metamaterials XIV; PC129901H (2024) https://doi.org/10.1117/12.3016694
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Flat metaoptics devices are paving a path towards compact and integrated photonics solutions. Composed of engineered subwavelength nanostructures, they offer freedom to shape light and alleviate alignment constraints compared to traditional optics. Utilizing conventional nanofabrication methods, their potential amplifies when combined with on-chip light sources and detectors. In our study, we introduce laser-integrated dielectric metasurfaces tailored for biophotonics applications. Our goal was to sculpt the emission of vertical-cavity surface-emitting lasers by directly fabricating metasurfaces on their emitting facets. Employing unique curved GaAs metagratings, we bypass aspect ratio-dependent etching issues, achieving fan-shaped emission with a ~60° off-axis deflection in both air and glass, with deflection efficiencies of 90% and 70%, respectively. We demonstrate proof-of-principle total internal reflectance and dark field imaging of Au nanoparticles and cells incubated with them. Our illumination module allows effortless toggling between these modes and, since the laser chip is outside the field of view, it is fully compatible with conventional microscopy setups.

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Citation Download Citation

Mindaugas Juodėnas, Erik Strandberg, Alexander Grabowski, Johan Gustavsson, Hana Šípová-Jungová, Anders Larsson, and Mikael Käll "Miniature photonics devices enabled by metagrating-integrated VCSELs", Proc. SPIE PC12990, Metamaterials XIV, PC129901H (11 June 2024); https://doi.org/10.1117/12.3016694

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