Additive manufacturing of high performance metalenses, waveguides and metamaterials via direct nanoimprint lithography

Dae-Eon Jung; Vince Einck; Lucas Verrastro; Uzodinma Okoroanyanwu; Amir Arbabi; James J. Watkins

doi:10.1117/12.3022468

18 June 2024 Additive manufacturing of high performance metalenses, waveguides and metamaterials via direct nanoimprint lithography

Dae-Eon Jung, Vince Einck, Lucas Verrastro, Uzodinma Okoroanyanwu, Amir Arbabi, James J. Watkins

Author Affiliations +

Proceedings Volume PC12995, 3D Printed Optics and Additive Photonic Manufacturing IV; PC1299503 (2024) https://doi.org/10.1117/12.3022468
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

We fabricate all-inorganic, high refractive index optics, including metalenses, waveguides, and diffractive optical elements via nanoimprint lithography with TiO2 nanoparticle dispersion inks and report full-wafer fabrication of visible wavelength metalenses with absolute focusing efficiencies greater than 80% (>95% of design efficiency). 3-D metal oxide log-piles are possible via direct NIL using sequential imprint, planarization, imprint cycles followed by removal of the sacrificial planarization layers. 3-D metal log-piles are possible via metallization of imprinted 3-D sacrificial templates. Several examples will be discussed.

Conference Presentation

Citation Download Citation

Dae-Eon Jung, Vince Einck, Lucas Verrastro, Uzodinma Okoroanyanwu, Amir Arbabi, and James J. Watkins "Additive manufacturing of high performance metalenses, waveguides and metamaterials via direct nanoimprint lithography", Proc. SPIE PC12995, 3D Printed Optics and Additive Photonic Manufacturing IV, PC1299503 (18 June 2024); https://doi.org/10.1117/12.3022468

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