Editorial: How long is ten years?

Burn J. Lin

doi:10.1117/1.3665263

1 October 2011 How long is ten years?

Burn J. Lin

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 4, 040101 (October 2011). https://doi.org/10.1117/1.3665263

Abstract

A message from the Editor-in-Chief.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Burn J. Lin "How long is ten years?," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 040101 (1 October 2011). https://doi.org/10.1117/1.3665263

Published: 1 October 2011

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KEYWORDS

Microelectromechanical systems

Microopto electromechanical systems

Logic

Manufacturing

Microfabrication

Immersion lithography

Lithography

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