Dry development for a directed self-assembly lithography hole-shrink process using CO/H2 plasma

Mitsuhiro Omura; Tsubasa Imamura; Hiroshi Yamamoto; Itsuko Sakai; Hisataka Hayashi

doi:10.1117/1.JMM.14.4.044505

28 October 2015 Dry development for a directed self-assembly lithography hole-shrink process using CO/H₂ plasma

Mitsuhiro Omura, Tsubasa Imamura, Hiroshi Yamamoto, Itsuko Sakai, Hisataka Hayashi

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 4, 044505 (October 2015). https://doi.org/10.1117/1.JMM.14.4.044505

Abstract

A dry development, directed self-assembly lithography (DSAL) hole-shrink process was studied, with a focus on the selectivity of the etching of poly(methyl methacrylate) (PMMA) over polystyrene (PS), and the suppression of etch stop. The highly selective etching of PMMA over PS was achieved using CO gas chemistry. However, it was found that the PMMA etching did not proceed beyond a certain depth. Scanning transmission electron microscopy and x-ray photoelectron spectroscopy analysis indicated that a deposition layer formed not only on the PS but also on the PMMA. The addition of H₂ to the CO plasma was effective in controlling the thickness of the deposition layer and in suppressing the etch stop. The CO/H₂ plasma process was combined with ion energy control to achieve a dry development for hole shrinkage. The dry development DSAL hole-shrink process was successfully realized by tailoring the etching gas chemistry and controlling the ion energy.

Citation Download Citation

Mitsuhiro Omura, Tsubasa Imamura, Hiroshi Yamamoto, Itsuko Sakai, and Hisataka Hayashi "Dry development for a directed self-assembly lithography hole-shrink process using CO/H₂ plasma," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(4), 044505 (28 October 2015). https://doi.org/10.1117/1.JMM.14.4.044505

Published: 28 October 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available