The Editorial Review Process

Chris A. Mack

doi:10.1117/1.JMM.14.3.030101

14 July 2015 The Editorial Review Process

Chris A. Mack

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 3, 030101 (July 2015). https://doi.org/10.1117/1.JMM.14.3.030101

This PDF file contains the editorial “The Editorial Review Process” for JM3 Vol. 14 Issue 03

Citation Download Citation

Chris A. Mack "The Editorial Review Process," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 030101 (14 July 2015). https://doi.org/10.1117/1.JMM.14.3.030101

Published: 14 July 2015

ACCESS THE FULL ARTICLE

JOURNAL ARTICLE
3 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

CITATIONS

Cited by 7 scholarly publications.

Explore citations on Lens.org

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microelectromechanical systems

Databases

Lithography

Metrology

Microfabrication

Microopto electromechanical systems

Roads

Show All Keywords

RELATED CONTENT

A smart litho friendly design method to enable fast lithography...
Proceedings of SPIE (March 20 2019)

Spectral analysis of line edge and line width roughness using...
Proceedings of SPIE (April 01 2021)

Microfabrication of ultrathick SU-8 photoresist for microengines
Proceedings of SPIE (January 15 2003)

Subscribe to Digital Library

Receive Erratum Email Alert

Show All Keywords

Keywords/Phrases

Search In:

Publication Years