Open Access
8 September 2016 Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers
Zhanna Santybayeva, Afaf Meghit, Rudy Desgarceaux, Roland Teissier, Frederic Pichot, Charles de Marin, Benoit Charlot, Francesco Pedaci
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Abstract
The use of optical tweezers (OTs) and spin angular momentum transfer to birefringent particles allows new mechanical measurements in systems where torque and rotation are relevant parameters at the single-molecule level. There is a growing interest in developing simple, fast, and inexpensive protocols to produce a large number of submicron scale cylinders of quartz, a positive uniaxial birefringent crystal, to be employed for such angular measurements in OTs. Here, we show that laser interference lithography, a method well known for its simplicity, fulfills these requirements and produces quartz cylindrical particles that we successfully use to apply and measure optical torque in the piconewton nm range in an optical torque wrench.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Zhanna Santybayeva, Afaf Meghit, Rudy Desgarceaux, Roland Teissier, Frederic Pichot, Charles de Marin, Benoit Charlot, and Francesco Pedaci "Fabrication of quartz microcylinders by laser interference lithography for angular optical tweezers," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(3), 034507 (8 September 2016). https://doi.org/10.1117/1.JMM.15.3.034507
Published: 8 September 2016
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CITATIONS
Cited by 16 scholarly publications.
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KEYWORDS
Optical tweezers

Quartz

Particles

Lithography

Photoresist materials

Polarization

Etching

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