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30 June 2018 High-density electrical and optical probes for neural readout and light focusing in deep brain tissue
Vittorino Lanzio, Melanie West, Alexander Koshelev, Gregory Telian, Paolo Micheletti, Raquel Lambert, Scott Dhuey, Hillel Adesnik, Simone Sassolini, Stefano Cabrini
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Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 17, Issue 2, 025503 (June 2018). https://doi.org/10.1117/1.JMM.17.2.025503
Abstract
To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width  ×  16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5  ×  25  μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250  nm  ×  160  nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Vittorino Lanzio, Melanie West, Alexander Koshelev, Gregory Telian, Paolo Micheletti, Raquel Lambert, Scott Dhuey, Hillel Adesnik, Simone Sassolini, and Stefano Cabrini "High-density electrical and optical probes for neural readout and light focusing in deep brain tissue," Journal of Micro/Nanolithography, MEMS, and MOEMS 17(2), 025503 (30 June 2018). https://doi.org/10.1117/1.JMM.17.2.025503
Received: 11 January 2018; Accepted: 4 June 2018; Published: 30 June 2018
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Cited by 11 scholarly publications.
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KEYWORDS
Waveguides
Electrodes
Silicon
Brain
Tissue optics
Optical design
Optical fibers
CHORUS Article. This article was made freely available starting 30 June 2019
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