Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate

Chia-Hsu Hsieh; Yi-Chan Yeh; Le-Quyen Ly; Guan-Jie Su; Shao-En Tsai; Yu-Hua Ye; Yu-Cheng Lin; I-Yu Huang

doi:10.1117/1.JMM.18.1.015002

19 February 2019 Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate

Chia-Hsu Hsieh, Yi-Chan Yeh, Le-Quyen Ly, Guan-Jie Su, Shao-En Tsai, Yu-Hua Ye, Yu-Cheng Lin, I-Yu Huang

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 1, 015002 (February 2019). https://doi.org/10.1117/1.JMM.18.1.015002

Abstract

Using microelectromechanical systems technology, a high-performance extended-gate field-effect transistor (EGFET)-based pesticide microsensor for organophosphorus and carbamate (CM) detection is developed. To minimize the whole pesticide-sensing system, we also integrated a planar Ti/Ag/AgCl/KCl-gel microreference electrode into the same silicon chip. The total dimensions of the proposed pesticide-sensing system are only 0.92 × 0.95 × 0.1 cm³. This EGFET-based microsensor for organophosphorus and CMs demonstrates extremely high sensitivity (194 and 268.1 mV/dec, respectively) and sensing linearity (0.993 and 0.974, respectively) and extremely low response time (120 and 300 s, respectively). The microsensor detection limit for both pesticides is 0.001 ppm.

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Chia-Hsu Hsieh, Yi-Chan Yeh, Le-Quyen Ly, Guan-Jie Su, Shao-En Tsai, Yu-Hua Ye, Yu-Cheng Lin, and I-Yu Huang "Extended-gate field-effect transistor-based pesticide microsensor for the detection of organophosphorus and carbamate," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(1), 015002 (19 February 2019). https://doi.org/10.1117/1.JMM.18.1.015002

Received: 19 September 2018; Accepted: 30 January 2019; Published: 19 February 2019

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