Resolution formulas and near-resolution-limit images of a periodic structure

Anthony Yen

doi:10.1117/1.JMM.21.3.030502

18 August 2022 Resolution formulas and near-resolution-limit images of a periodic structure

Anthony Yen

Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 21, Issue 3, 030502 (August 2022). https://doi.org/10.1117/1.JMM.21.3.030502

Abstract

Abbe’s resolution formulas for a grating imaged under on-axis, off-axis, and incoherent illuminations are obtained with the help of the line-spread function. A rule-of-thumb relationship applicable to the extreme ultraviolet mask for patterning a grating near the resolution limit of the imaging optics is given.

Citation Download Citation

Anthony Yen "Resolution formulas and near-resolution-limit images of a periodic structure," Journal of Micro/Nanopatterning, Materials, and Metrology 21(3), 030502 (18 August 2022). https://doi.org/10.1117/1.JMM.21.3.030502

Received: 25 June 2022; Accepted: 4 August 2022; Published: 18 August 2022

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