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A unique evanescent-wave biosensor was designed and fabricated using simple and robust microfabrication technology. The sensor uses a microscale optical waveguide fabricated from NOA61 that is surface-altered with a custom chemical modification process, coupled with modified self-assembly of an oxygen-sensitive fluorescent dye and the enzyme glucose oxidase. To interface the analyte with the waveguide surface, a multilayer PDMS fluidic mold was designed to fit over the waveguide. Interfacing of both optics and fluidics was achieved using novel-generic methods. The entire device has been successfully fabricated and assembled, with analyte response testing completed using glucose solutions. The system also demonstrated inherent random noise insensitivity while making measurements.
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David A. Chang-Yen, Bruce K. Gale, "Design, fabrication, and packaging of a practical multianalyte-capable optical biosensor," J. Micro/Nanolith. MEMS MOEMS 5(2) 021105 (1 April 2006) https://doi.org/10.1117/1.2203666