Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments

David L. Dickensheets

doi:10.1117/1.2911024

1 April 2008 Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments

David L. Dickensheets

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 2, 021008 (April 2008). https://doi.org/10.1117/1.2911024

Abstract

We explore the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopesand optical coherence tomography instruments that are miniaturizedfor in-situ imaging. Membrane requirements to achieve specified system performance are explored for both high and low numerical aperture regimes. Examples of both confocal imaging and focus-tracking optical coherence tomography using varifocus silicon nitride MEMS mirrors are presented. It is envisioned that future instruments with enhanced-stroke adaptive membrane mirrors will provide high fidelity microscopy and optical coherence tomography for diagnostic imaging of intact, living tissue.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

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David L. Dickensheets "Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 021008 (1 April 2008). https://doi.org/10.1117/1.2911024

Published: 1 April 2008

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