Refractive analog for modeling electrostatic ion lenses

William C. Sweatt; Paul A. Miller

doi:10.1117/12.55839

1 May 1991 Refractive analog for modeling electrostatic ion lenses

William C. Sweatt, Paul A. Miller

Author Affiliations +

Optical Engineering, Vol. 30, Issue 5, (May 1991). https://doi.org/10.1117/12.55839

Abstract

Electrostatic lenses are used extensively to control charged-particle beams. In a particular application to ion beam lithography for microelectronics fabrication, it was necessary to perform extensive calculations of the focal properties of cylindrically symmetric ion lenses. We have found that the imaging properties of cylindrical electrostatic ion lenses can be modeled accurately and efficiently by a series of refractive optical lenses. This is a key step toward the use of mature optical design tools for the design of systems that focus charged particles.

Citation Download Citation

William C. Sweatt and Paul A. Miller "Refractive analog for modeling electrostatic ion lenses," Optical Engineering 30(5), (1 May 1991). https://doi.org/10.1117/12.55839

Published: 1 May 1991

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available