Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists

Michael T. Gale; Markus Rossi; Joern Pedersen; Helmut Schuetz

doi:10.1117/12.179892

1 November 1994 Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists

Michael T. Gale, Markus Rossi, Joern Pedersen, Helmut Schuetz

Author Affiliations +

Optical Engineering, Vol. 33, Issue 11, (November 1994). https://doi.org/10.1117/12.179892

Abstract

A laser writing system for the fabrication of continuous-relief micro-optical elements in photoresist is described. The technology enables a wide range of planar micro-optical elements to be fabricated and replicated into polymer film using Ni shims electroformed from the photo-resist originals. The advantages and limitations of laser writing technology for micro-optics fabrication are discussed. Examples of fabricated micro-optical elements include Fresnel microlenses and microlens arrays, kinoforms, and other continuous-relief phase elements.

Citation Download Citation

Michael T. Gale, Markus Rossi, Joern Pedersen, and Helmut Schuetz "Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists," Optical Engineering 33(11), (1 November 1994). https://doi.org/10.1117/12.179892

Published: 1 November 1994

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