New method for the measurement of surface variations using a microdevice and a scanning electron microscope

Satoshi Kishimoto; George C. Johnson

doi:10.1117/1.601459

1 August 1997 New method for the measurement of surface variations using a microdevice and a scanning electron microscope

Satoshi Kishimoto, George C. Johnson

Author Affiliations +

Optical Engineering, Vol. 36, Issue 8, (August 1997). https://doi.org/10.1117/1.601459

A technique for measuring the contour of a specimen’s surface is developed. A small microdevice produced by a micromachining technique and the electron beam scan of a scanning electron microscope (SEM) are used for this method. A small microgrid consisting of microsquare bars is placed over the specimen’s surface and obstructs the back-scattered electrons. Therefore, the shadows of the microbars are observed in the SEM image. The distance between the microgrid and the specimen’s surface can be calculated using the width of the shadow. This method makes it possible to detect the form of the specimen’s surface. As a demonstration, the shape of the Rockwell hardness tester’s indent mark is measured and the accuracy of this method is discussed.

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Satoshi Kishimoto and George C. Johnson "New method for the measurement of surface variations using a microdevice and a scanning electron microscope," Optical Engineering 36(8), (1 August 1997). https://doi.org/10.1117/1.601459

Published: 1 August 1997

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