Richard Schneider, Anton Schick, Paul Koellensperger, Takanori Ninomiya
Optical Engineering, Vol. 36, Issue 10, (October 1997) https://doi.org/10.1117/1.601412
TOPICS: 3D scanning, Sensors, Inspection, 3D image processing, Scanners, Laser scanners, Mirrors, Signal detection, Lead, Lens design
The optical principle of a high-speed three-dimensional scanner that can operate at high and medium resolution was developed on the basis of confocal microscopy. It was shown that 3-D detection of surfaces, essentially independent of surface characteristics such as inclination and reflectivity, is feasible. Shading effects were found to be negligible. A data rate of 2 Mpixel/s and a 3-D resolution of 5 to 15 µm at 150-mm to 1.5-mm height range were achieved. In a factory a highresolution scanner has been operating successfully for automatic solder joint inspection of multichip modules since 1994. Also, a mediumresolution system for solder joint inspection of surface-mounted devices was developed and evaluated. In view of their high inspection reliability, the developed 3-D inspection systems promise to be a powerful tool for use in production lines.