Theoretical investigation of the influence of a diaphragm on the flat surface of a solid immersion lens on beam parameters

Anatoly S. Lapchuk; Viacheslav V. Petrov; Andrey A. Kryuchin; Semen M. Shanoylo

doi:10.1117/1.1387441

1 August 2001 Theoretical investigation of the influence of a diaphragm on the flat surface of a solid immersion lens on beam parameters

Anatoly S. Lapchuk, Viacheslav V. Petrov, Andrey A. Kryuchin, Semen M. Shanoylo

Author Affiliations +

Optical Engineering, Vol. 40, Issue 8, (August 2001). https://doi.org/10.1117/1.1387441

The optical property of a solid immersion lens with a flat surface, coated with an opaque thin film with a rectangular hole is investigated on the basis of a three-dimensional vector mathematical model. The laser beam is focused on the center of the hole. It is shown that the side lobe in the energy flux vector distribution in the focal plane of a solid immersion lens with a large numerical aperture (>1.5) significantly decreased the optical efficiency of the lens. The results of digital simulation show that an opaque thin film with a hole, equal or larger than the width of the main lobe, significantly increases the transmission coefficient because it closes the inverse electromagnetic energy flux in the side lobe. The hole has an unimportant influence on the energy flux vector distribution in the main light spot when its dimensions are equal or larger than the dimension of the central lobe of the laser beam. The distribution of electrical and magnetic intensity is also investigated.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Anatoly S. Lapchuk, Viacheslav V. Petrov, Andrey A. Kryuchin, and Semen M. Shanoylo "Theoretical investigation of the influence of a diaphragm on the flat surface of a solid immersion lens on beam parameters," Optical Engineering 40(8), (1 August 2001). https://doi.org/10.1117/1.1387441

Published: 1 August 2001

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