Laser direct write of silicon nanowires

James I. Mitchell; Se Jun Park; Charles A. Watson; Pornsak Srisungsitthisunti; Chookiat Tansarawiput; Minghao Qi; Eric A. Stach; Chen Yang; Xianfan Xu

doi:10.1117/1.3630225

1 October 2011 Laser direct write of silicon nanowires

James I. Mitchell, Se Jun Park, Charles A. Watson, Pornsak Srisungsitthisunti, Chookiat Tansarawiput, Minghao Qi, Eric A. Stach, Chen Yang, Xianfan Xu

Author Affiliations +

Optical Engineering, Vol. 50, Issue 10, 104301 (October 2011). https://doi.org/10.1117/1.3630225

Abstract

Using laser direct writing in combination with chemical vapor deposition to produce nanometer scale electronics holds several advantages over current large scale photolithography methods. These include single step electrical interconnect deposition, mask-less patterning, and parallel processing. When taken together they make quick production of individualized electronic circuits possible. This work demonstrates the ability of combining laser direct write and chemical vapor deposition to produce silicon wires a few hundred nanometers wide. Optimized parameters will be discussed, with a particular emphasis paid to the laser-material interactions. The feasibility for electronic applications will be shown by examining the deposition formation on a silicon dioxide surface without degrading the surface's integrity, and by evaluating the resistivity of the deposited silicon wires.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

James I. Mitchell, Se Jun Park, Charles A. Watson, Pornsak Srisungsitthisunti, Chookiat Tansarawiput, Minghao Qi, Eric A. Stach, Chen Yang, and Xianfan Xu "Laser direct write of silicon nanowires," Optical Engineering 50(10), 104301 (1 October 2011). https://doi.org/10.1117/1.3630225

Published: 1 October 2011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available