Measurement system of dynamic microscopic deformation for membrane based on fringe projection

Feipeng Zhu; Dong Lei; Xiaoyuan He

doi:10.1117/1.OE.52.3.033604

20 March 2013 Measurement system of dynamic microscopic deformation for membrane based on fringe projection

Feipeng Zhu, Dong Lei, Xiaoyuan He

Author Affiliations +

Optical Engineering, Vol. 52, Issue 3, 033604 (March 2013). https://doi.org/10.1117/1.OE.52.3.033604

Abstract

The bulge test has been utilized extensively in determining the mechanical properties of thin film materials. We develop a bulge-test system that consists of three main components, including an optical system, a loading system, and a control system. A telecentric lens is adopted as an imaging camera in an optical system to provide high imaging quality along with a constant angle of view across the entire field of view. The out-of-plane deformation is obtained by projecting a sinusoidal fringe pattern onto a specimen surface and analyzing recorded images with a digital image correlation algorithm. A least-squares polynomial fitting is presented to solve the problem that the out-of-plane calibration coefficient is not a constant. Experiments were performed to validate the availability and reliability of this proposed bulge-test system in the measurement of a dynamic microscopic deformation of membrane. The measuring range of deformation is from several microns to hundreds of microns with an accuracy of 0.6 μm.

Citation Download Citation

Feipeng Zhu, Dong Lei, and Xiaoyuan He "Measurement system of dynamic microscopic deformation for membrane based on fringe projection," Optical Engineering 52(3), 033604 (20 March 2013). https://doi.org/10.1117/1.OE.52.3.033604

Published: 20 March 2013

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