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4 June 2013 Ultraviolet laser writing system based on polar scanning strategy to produce subwavelength metal gratings for surface plasmon resonance
Jun Amako, Eiichi Fujii
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Optical Engineering, Vol. 52, Issue 6, 063403 (June 2013). https://doi.org/10.1117/1.OE.52.6.063403
Abstract
We demonstrate the use of ultraviolet (UV) laser lithography in the production of subwavelength metal gratings. A laser writing system with a 413-nm Kr laser is used to write patterns on a resist-coated fused silica substrate mounted on a rotating table with a linear slider. One- and two-dimensional patterns are written in the resist at a selected sampling pitch or grating period, and the substrate is dry etched and coated with Au to obtain metallized gratings. Surface plasmon resonance dips, which appear in the reflectance spectra of the gratings, shift depending on the orientation of the incident polarization, because the gratings lack perfect symmetry owing to a system-induced skew in the writing beam. This dip shift can be considered tolerable when the gratings are used as a signal enhancer in Raman sensing applications. We conclude that UV laser writing based on polar coordinates is a candidate method for surface structuring on submicron scales. Devising a method to attain an unskewed beam will be the subject of future work.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Jun Amako and Eiichi Fujii "Ultraviolet laser writing system based on polar scanning strategy to produce subwavelength metal gratings for surface plasmon resonance," Optical Engineering 52(6), 063403 (4 June 2013). https://doi.org/10.1117/1.OE.52.6.063403
Published: 4 June 2013
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Cited by 3 scholarly publications.
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KEYWORDS
Reflectivity
Polarization
Ultraviolet radiation
Metals
Laser systems engineering
Surface plasmons
Raman spectroscopy
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