Fabrication of microhole arrays on coated silica sheet using femtosecond laser

Zhuping Wang; Guoying Feng; Jinghua Han; Shutong Wang; Ruifeng Hu; Guang Li; Shenyu Dai; Shouhuan Zhou

doi:10.1117/1.OE.55.10.105101

14 October 2016 Fabrication of microhole arrays on coated silica sheet using femtosecond laser

Zhuping Wang, Guoying Feng, Jinghua Han, Shutong Wang, Ruifeng Hu, Guang Li, Shenyu Dai, Shouhuan Zhou

Author Affiliations +

Optical Engineering, Vol. 55, Issue 10, 105101 (October 2016). https://doi.org/10.1117/1.OE.55.10.105101

Abstract

A femtosecond (fs) laser beam machining method has been proposed to improve the quality of micromachining. At first, the coated silica sheet is prepared by pulsed laser deposition, then the coated silica is processed by the fs laser. After that, the aluminum film on a fused silica sheet is cleared out by hydrochloric acid (HCl) in a solution of 10%, and then the microhole array is formed on the silica which has better morphologies. Additionally, some mathematical models are constructed to analyze the diffusion of vapors and reflection of shock waves during the machining process. The theoretical results show that the aluminum film can effectively decrease the pressure gradient of the vapors and the reflection of shock wave pressure on the fused silica during the machining process. The simulation is consistent with experimental results. Finally, coating with a film or not has a great influence on the quality of micromachining, but the types of coating films have little influence. In a word, it is an excellent choice to improve the quality of fs laser processing by coating with a film on a fused silica sheet.

Citation Download Citation

Zhuping Wang, Guoying Feng, Jinghua Han, Shutong Wang, Ruifeng Hu, Guang Li, Shenyu Dai, and Shouhuan Zhou "Fabrication of microhole arrays on coated silica sheet using femtosecond laser," Optical Engineering 55(10), 105101 (14 October 2016). https://doi.org/10.1117/1.OE.55.10.105101

Published: 14 October 2016

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