Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry

Donghui Zheng; Lei Chen; Qinyuan Sun; Wenhua Zhu; Jinpeng Li; Jianxin Li

doi:10.1117/1.OE.55.12.124103

16 December 2016 Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry

Donghui Zheng, Lei Chen, Qinyuan Sun, Wenhua Zhu, Jinpeng Li, Jianxin Li

Author Affiliations +

Optical Engineering, Vol. 55, Issue 12, 124103 (December 2016). https://doi.org/10.1117/1.OE.55.12.124103

Abstract

Optical inhomogeneity is an important index to evaluate optical transmission material. We propose an absolute measurement method for optical inhomogeneity of the parallel plate with phase-shifting interferometry (PSI). Compared with the window-flipping method, we introduce another transmission flat and add two cavity measurements between the two transmission flats and the reflective flat with the assistance of a Fizeau interferometer. Simulation and experiment results show that the method can effectively eliminate the disturbances of both surfaces of the parallel plate, the reflective flat, and the system error of the interferometer. It reduces the requirement for surface accuracy of the transmission and reflective flats. It is an absolute measurement method for the optical inhomogeneity of the parallel plate, which can be realized with traditional phase-shifting interferometry.

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Donghui Zheng, Lei Chen, Qinyuan Sun, Wenhua Zhu, Jinpeng Li, and Jianxin Li "Absolute measurement for optical inhomogeneity of parallel plate using phase-shifting interferometry," Optical Engineering 55(12), 124103 (16 December 2016). https://doi.org/10.1117/1.OE.55.12.124103

Published: 16 December 2016

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