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Dr. Aysegul Cumurcu Gysen
Application Engineer at ASML Netherlands BV
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Publications (2)
Proceedings Article | 13 November 2024 Presentation
High-resolution lithography: latest generation in EUV lithograph with 0.55 NA
Aysegul Cumurcu Gysen, Cheuk-Wah Man, Bas van Meerten, Hilbert van Loo, Eelco van Setten, Stefan Smith-Meerman, Gokay Yegen, Diederik de Bruin, Jan van Schoot, Rudy Peeters, Kaustuve Bhattacharyya, Greet Storms, Peter Vanoppen
Proceedings Volume PC13215, PC1321505 (2024) https://doi.org/10.1117/12.3036955
KEYWORDS: Extreme ultraviolet, Lithography, Metals, Extreme ultraviolet lithography, Design, Chip manufacturing, Overlay metrology, Optical lithography
Proceedings Article | 28 March 2017 Paper
Application of advanced diffraction based optical metrology overlay capabilities for high-volume manufacturing
Kai-Hsiung Chen, Guo-Tsai Huang, Hung-Chih Hsieh, Wei-Feng Ni, S. M. Chuang, T. K. Chuang, Chih-Ming Ke, Jacky Huang, Shiuan-An Rao, Aysegul Cumurcu Gysen, Maxime d'Alfonso, Jenny Yueh, Pavel Izikson, Aileen Soco, Jon Wu, Tjitte Nooitgedagt, Jeroen Ottens, Yong Ho Kim, Martin Ebert
Proceedings Volume 10145, 1014528 (2017) https://doi.org/10.1117/12.2257894
KEYWORDS: Overlay metrology, Metrology, High volume manufacturing, Scatterometry, Diffraction, Optical metrology, Lithography, Process control, Optical lithography, Time metrology, Image registration, Target acquisition, Semiconducting wafers
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