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Andrea Opreni
at Politecnico di Milano
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Publications (1)
Proceedings Article | 5 March 2021 Poster + Presentation + Paper
Electro-mechanical validation of a resonant MEMS mirror with PZT actuation and PZR sensing
G. Mendicino, M. Merli, R. Carminati, N. Boni, A. Opreni, A. Frangi
Proceedings Volume 11697, 1169715 (2021) https://doi.org/10.1117/12.2576877
KEYWORDS: Mirrors, Microelectromechanical systems, Ferroelectric materials, Sensors, Data modeling, Wheatstone bridges, System integration, Projection systems, Piezoresistive sensors, Optical testing
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