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Dr. Andrew Yacoot
at National Physical Lab
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Author
Publications (4)
Proceedings Article | 26 June 2017 Paper
Broadband interferometric characterisation of nano-positioning stages with sub-10 pm resolution
Zhi Li, Uwe Brand, Helmut Wolff, Ludger Koenders, Andrew Yacoot, Prabowo Puranto
Proceedings Volume 10329, 1032944 (2017) https://doi.org/10.1117/12.2270262
KEYWORDS: Mirrors, Nanolithography, Beam splitters, Signal processing, Calibration, Interferometry, Data acquisition, Interferometers, Homodyne detection, Laser interferometry, Sensor calibration, Modulation, Digital signal processing
Proceedings Article | 12 January 2009 Paper
Dimensional nanometrology at the National Physical Laboratory
Andrew Yacoot, Richard Leach, Ben Hughes, Claudiu Giusca, Christopher Jones, Alan Wilson
Proceedings Volume 7133, 713345 (2009) https://doi.org/10.1117/12.807994
Proceedings Article | 5 April 2007 Paper
Line width measurement below 60nm using an optical interferometer and artificial neural network
Proceedings Volume 6518, 65181F (2007) https://doi.org/10.1117/12.712278
KEYWORDS: Signal to noise ratio, Interferometers, Principal component analysis, Artificial neural networks, Photons, Point spread functions, Classification systems, Optical testing, Critical dimension metrology, Optical resolution
Proceedings Article | 29 August 2005 Paper
Sub-0.1µm optical track width measurement
Proceedings Volume 5858, 58580M (2005) https://doi.org/10.1117/12.611999
KEYWORDS: Interferometers, Artificial neural networks, Optical tracking, Objectives, Signal to noise ratio, Fourier transforms, Optical testing, Optical networks, Signal processing, Optical microscopes
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