Mr. Atsushi Ueda Profile

Atsushi Ueda

at Gigaphoton Inc

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Publications (2)

Proceedings Article | 12 November 2024 Poster + Paper

Development progress of Gigaphoton’s LPP EUV light source for inspection systems

Atsushi Ueda, Fumio Iwamoto, Yoshifumi Ueno, Shinji Nagai, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Tamotsu Abe, Hiroaki Nakarai, Takashi Saitou

Proceedings Volume 13215, 132150X (2024) https://doi.org/10.1117/12.3034058

KEYWORDS: Extreme ultraviolet, Light sources, Tin, Collector mirrors, Plasma, Plasma generation, Reflectivity, Laser irradiation

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Proceedings Article | 26 March 2019 Paper

Update of the development progress of the high power LPP-EUV light source using a magnetic field

Atsushi Ueda, Shinji Nagai, Tsukasa Hori, Yutaka Shiraishi, Tatsuya Yanagida, Kenichi Miyao, Hideyuki Hayashi, Yukio Watanabe, Takeshi Okamoto, Tamotsu Abe, Takeshi Kodama, Hiroaki Nakarai, Takashi Saito, Hakaru Mizoguchi

Proceedings Volume 10957, 109571S (2019) https://doi.org/10.1117/12.2514809

KEYWORDS: Tin, Gas lasers, Extreme ultraviolet, Magnetism, Carbon monoxide, Mirrors, Plasma, Light sources, Pulsed laser operation, Semiconductors

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