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Dr. Axel Schindler
at scia Systems GmbH
SPIE Involvement:
Author
Publications (5)
Proceedings Article | 27 August 2015 Paper
Fabrication and qualification of roughness reference samples for industrial testing of surface roughness levels below 0.5 nm Sq
O. Faehnle, E. Langenbach, F. Zygalsky, F. Frost, R. Fechner, A. Schindler, M. Cumme, H. Biskup, C. Wünsche, R. Rascher
Proceedings Volume 9575, 957512 (2015) https://doi.org/10.1117/12.2189790
KEYWORDS: Surface roughness, Calibration, Silicon, Etching, Atomic force microscopy, Silica, Ion beams, Reactive ion etching, Measurement devices, Polishing
Proceedings Article | 25 April 2006 Paper
Resonant grating pulse compression element with 99% flat top efficiency for high average power femtosecond laser machining
Manuel Flury, Nikolay Lyndin, Renate Fechner, Axel Schindler, Svetlen Tonchev, Michel Spajer, Youcef Ouerdane, Nathalie Destouches, David Pietroy, Stéphanie Reynaud, Olivier Parriaux
Proceedings Volume 6187, 61871I (2006) https://doi.org/10.1117/12.668374
KEYWORDS: Diffraction, Diffraction gratings, Femtosecond phenomena, Silica, Mirrors, Hybrid fiber optics, Reflection, Multilayers, Sensors, Sapphire lasers
Proceedings Article | 20 October 2005 Paper
Synchrotron radiation mirror prototype made of monocrystalline tungsten
Volker Herold, Heiner Lammert, Axel Schindler, Rainer Schwennicke, Frank Siewert
Proceedings Volume 5965, 596521 (2005) https://doi.org/10.1117/12.625552
KEYWORDS: Tungsten, Mirrors, Silicon carbide, Silicon, Chemical mechanical planarization, Synchrotron radiation, Prototyping, Crystals, Surface finishing, Zerodur
Proceedings Article | 17 September 2005 Paper
Advanced metrology: an essential support for the surface finishing of high performance x-ray optics
Frank Siewert, Heiner Lammert, Tino Noll, Thomas Schlegel, Thomas Zeschke, Thomas Hänsel, Andreas Nickel, Axel Schindler, Bernd Grubert, Carsten Schlewitt
Proceedings Volume 5921, 592101 (2005) https://doi.org/10.1117/12.622747
KEYWORDS: Nano opto mechanical systems, Optical components, Surface finishing, Mirrors, Metrology, Ion beams, Optics manufacturing, Ion beam finishing, Ocean optics, Spatial resolution
Proceedings Article | 9 May 2005 Paper
NDT of wafer direct bonding by non-confocal transmission phase sensitive acoustic microscopy
Evgeny Twerdowski, Reinhold Wannemacher, Axel Schindler, Nasser Razek, Wolfgang Grill
Proceedings Volume 5768, (2005) https://doi.org/10.1117/12.599758
KEYWORDS: Semiconducting wafers, Acoustics, Interfaces, Wafer bonding, Microscopy, Point spread functions, Ultrasonics, Transducers, Silicon, Nondestructive evaluation
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