Mr. B. Krishnakumar Profile

B. Krishnakumar

at Intel Corporation

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Author

Publications (2)

Proceedings Article | 6 December 2004 Paper

Reduction of radial CD errors and Cr loading effects in 90-nm binary NCAR mask process through chrome etch DOE

Jian Ma, Chaoyang Li, Larry Bassist, Matthew Pekney, Nathan Wilcox, Jeff Farnsworth, Edward Lauder, B. Krishnakumar

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.568423

KEYWORDS: Critical dimension metrology, Photomasks, Chromium, Etching, Diffractive optical elements, Semiconducting wafers, Reticles, Phase modulation, Optical proximity correction, Manufacturing

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Proceedings Article | 27 August 1992 Paper

Visual sensitivity to color-varying stimuli

Sarah Rajala, H. Joel Trussell, B. Krishnakumar

Proceedings Volume 1666, (1992) https://doi.org/10.1117/12.135983

KEYWORDS: Visualization, Spatial frequencies, Human vision and color perception, Visual system, Retina, Calibration, Eye, Quantization, Modulation, Colorimetry

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