In this paper we present the novel concept of tomography system for characterization of small phase microelements such as telecom fiber splices. We demonstrate the measurement method, existing setup and its modification towards creation of miniaturized waveguide based Mach-Zehnder interferometer for telecom fiber assessment. Additionally we present and analyze Deep Proton Writing as a promising technology for rapid prototyping of monolithic microinterferometer in PMMA.
With our in-house technology, Deep Proton Writing (DPW) we fabricate, apart from other components, spherical refractive microlenses. Till now, the fabrication of cylindrical microlenses was an unexplored field within our technology. In this paper we will show how we can use Deep Proton Writing as an effective technology for the fabrication of cylindrical microlenses and microlens arrays with specific design parameters. We will explain the adjustments we made to our standard fabrication process as well as the investigation procedure we followed to fulfill our goal.
We present Deep Lithography with Protons (DLP) as a rapid prototyping technology to fabricate waveguide-based micro-optical components with monolithically integrated 45° micro-mirrors acting as out-of-plane couplers, splitting the optical signal in 3 separated paths. For the first time, two different proton beam sizes are used during one irradiation and a 20μm collimating aperture is chosen to accurately define the out-of-plane coupling structures. We fully optimized the DLP process for this 20μm proton beam and we measured the surface roughness (Rq=27.5nm) and the flatness (Rt=3.17μm) of the realized components. Finally, we experimentally measured the optical transmission efficiency of the micro-optical splitter component. The results are in excellent
agreement with non-sequential ray-tracing simulations performed for the design. Above that, we present a pluggable out-of-plane coupler incorporating a single micro-mirror for the 90° coupling of light to or from polymer multimode waveguides integrated on a printed circuit board (PCB). This millimeter-sized mass-reproducible component can then be readily inserted into laser ablated cavities. Nonsequential ray-tracing simulations are performed to predict the optical performance of the component, showing coupling efficiencies up to 78%. These results are then experimentally verified using piezo-motorized positioning equipment with submicron accuracy in a multimode fiber-to-fiber coupling scheme, showing coupling efficiencies up to 56%. The fabricated coupling components are suitable for low-cost mass production since our micro-optical
prototyping technology is compatible with standard replication techniques, such as hot embossing and injection molding, has been shown before.
In this paper we give an overview of the fabrication and assembly induced performance degradation of an intra-multi-chip-module free-space optical interconnect, integrating micro-lenses and a deflection prism above a dense opto-electronic chip.
The proposed component is used to demonstrate the capabilities of an accurate micro-optical rapid prototype technique, namely the Deep Proton Writing (DPW).
To evaluate the accuracy of DPW and to assess whether our assembly scheme will provide us with a reasonable process yield, we have built a simulation framework combining mechanical Monte Carlo analysis with optical simulations. Both the technological requirements to ensure a high process yield, and the specifications of our in-house DPW technology are discussed. Therefore, we first conduct a sensitivity analysis and we subsequently simulate the effect of combined errors using a Monte Carlo simulation. We are able to investigate the effect of a technology accuracy enhancement on the fabrication and assembly yield by scaling the standard deviation of the errors proportionally to each sensitivity interval.
We estimate that 40% of the systems fabricated with DPW will show an optical transmission efficiency above -4.32 dB, which is -3 dB below the theoretical obtainable value.
We also discuss our efforts to implement an opto-mechanical Monte Carlo simulator. It enables us to address specific issues not directly related with the micro-optical or DPW components, such as the influence of glueing layers and structures that allow for self-alignment, by combining mechanical tolerancing algorithms with optical simulation software. More in particular we determined that DPW provides ample accuracy to meet the requirements to obtain a high manufacturing yield.
Finally, we shortly highlight the basic layout of a completed demonstrator. The adhesive bonding of opto-electronic devices in their package is subject to further improvement to enhance the tilt accuracy of the devices with respect to the optical interconnect modules.
We design two different types of lens-based fibre connectors and perform a tolerance study on these connectors through optical simulations. Next, we assemble these connectors and we measure experimentally the coupling efficiency. To obtain a better agreement between the experimental results and the results from the simulations, we measure the exact surface profiles of the micro-lenses and implement these real surface profiles in the simulation models. Finally, we repeat the tolerance analysis using the real lens surface profiles in the simulation.
One of the grand challenges in solving the interconnection bottlenecks at the Printed Circuit Board (PCB) and Multi-Chip-Module (MCM) level, is to adequately replace the PCB and intra-MCM galvanic interconnects with high-performance, low-cost, compact and reliable micro-photonic alternatives. In our labs at the Vrije Universiteit Brussel we are therefore focusing on the continuous development of a rapid prototyping technology for micro-optical interconnect modules, which we call Deep Proton Writing (DPW).The special feature of this prototyping technology is that it is compatible with commercial low-cost mass replication techniques such as micro injection moulding and hot embossing. We will address more specifically in this paper the following components: 1) out-of-plane couplers for optical wave-guides embedded in PCB, 2) peripheral fiber ribbons and two dimensional single- and multimode fiber connectors for high-speed parallel optical connections, and 3) intra-MCM level optical interconnections via free-space optical modules.
We furthermore give special attention to the optical tolerancing and the opto-mechanical integration of the components. We use both a sensitivity analysis to misalignment errors and Monte Carlo simulations. It is our aim to investigate the whole component integration chain from the optoelectronic device to the micro-opto-mechanical components constituting the interconnect module.
We present a pluggable micro-optical component fabricated with Deep Lithography with Protons, incorporating a micro-mirror for the out-of-plane coupling of light to or from polymer multimode waveguides integrated on a printed circuit board (PCB). This millimeter-sized mass-reproducible component can then be readily inserted into laser ablated cavities. The roughness of the optical surfaces of the component is measured using a non-contact optical profiler, showing a local average RMS roughness around 30nm. Non-sequential ray-tracing simulations are performed to predict the optical performance of the component, showing coupling efficiencies up to 78% and a rigorous study on misalignment tolerances is performed. These results are then experimentally verified using piezo-motorized positioning equipment with submicron accuracy. As a first step, we characterize the component in a multimode fiber-to-fiber coupling scheme, showing coupling efficiencies up to 56%. As a second testbed, we use multimode waveguides patterned by UV-exposure in Truemode polymer, incorporating excimer laser ablated cavities. The size and depth of the cavities can be easily adapted on the design of the coupling structure, whereas alignment marks can be defined in the same processing step. Due to the multimode character of the waveguides, the total internal reflection condition is not always fully satisfied. Therefore, we investigate the application of a metal reflection coating on the micro-mirrors to improve the coupling efficiency. The fabricated coupling components are suitable for low-cost mass production since the compatibility of our prototyping technology with standard replication techniques, such as hot embossing and injection molding, has been shown before.
SINPHOS is a monolithic micro-device, able to measure simultaneously time distribution and spectrum of photons coming from a weak source like Delayed Luminescence of biological systems. In order to achieve this challenging goal, we use: Deep Lithography with Ions (DLI) and microelectronic technologies for the fabrication of dedicated passive micro-optical elements and for the realization of Single Photon Avalanche Diode (SPAD) detectors, respectively
Nowadays development of optical networks causes significant grow of interest in reliable fiber connections. Although fiber splicing techniques are well known, the assessment of a joint quality still bases on the simple image processing estimation. In advanced applications such solution is not sufficient and more trustworthy method is needed. One of the promising techniques of reliable measurements is microinterferometric tomography which allows determination of three-dimensional refractive index distributions in phase isotropic microelements. Measurement bases on interferometric scan of the tested element. Contrary to the classical testing methods based on attenuation tests microinterferometric tomography analyses an inspected fiber with the beam passing perpendicularly to the fiber axis. Tomographic scans taken for numerous, well defined angular positions and further calculations result 3D map of the area with clearly seen splice zone.
In this paper we propose the novel design of the integrated low-cost microinterferometric tomography setup (fig.1). The system is built as the waveguide Mach-Zehnder interferometer with reduced vibration sensitivity due to using the grating beamsplitter and recombiner. Additionally we present the details of design of microinterferometric tomography setup and the initial remarks on the possibility to fabricate it with Deep Lithography with Protons (DLP) - unique master prototyping technology of fabrication both micromechanical and microoptical elements in polymer material.
We aim to take an advantage of compactness and reduced dimensions of the interferometer to implement it as the possible accessory of the commercial optical fiber splicer.
The strength of today's deep lithographic micro-machining
technologies is their ability to fabricate monolithic
building-blocks including optical and mechanical functionalities
that can be precisely integrated in more complex photonic systems.
In this contribution we present the physical aspects of Deep
Lithography with ion Particles (DLP). We investigate the impact of
the ion mass, energy and fluence on the developed surface profile
to find the optimized irradiation conditions for different types
of high aspect ratio micro-optical structures. To this aim, we
develop a software program that combines the atomic interaction
effects with the macroscopic beam specifications. We illustrate
the correctness of our simulations with experimental data that we
obtained in a collaboration established between the accelerator
facilities at TUM, LNS and VUB. Finally, we review our findings
and discuss the strengths and weaknesses of DLP with respect to
Deep Lithography with X-rays (LIGA).
In this paper we present the state-of-the-art of Deep Lithography with Protons (DLP), a technology that we have adopted and optimized to rapidly prototype three-dimensional micro-optical components and high-aspect ratio micro-mechanical structures in Poly(Methyl MethAcrylate). In particular we focus on the fabrication of individual plastic refractive microlenses featuring a wide range of numerical apertures, diameters and pitches and their 2D arrays. We give a detailed description of the microlens fabrication technique and the calibration procedure that goes along with it. We highlight the quantitative geometrical and optical characteristics of these DLP microlenses and we demonstrate the reproducibility of their fabrication process. We also illustrate the prototyping flexibility of DLP by making arrays featuring microlenses with different sags, pitches and diameters.
We present Deep Lithography with Protons (DLP) for the fabrication
of ultra-dense fiber coupling elements which consist of circular,
conical-shaped alignment features, ordered in a 2D array with
high-precision pitches. This technology relies on the irradiation
of PMMA-resist layers with a swift proton beam featuring a
well-defined circular shape, followed by a selective development
of these exposed zones. To increase the coupling efficiency, the
DLP-technology allows to integrate uniform spherical micro-lenses,
which are created by a controlled swelling of the proton-bombarded
domains in a monomer vapor, in front of the micro-alignment holes.
We will first discuss our work on the improvement of the DLP
irradiation and development process step to enhance the coupling
efficiency and the field-installability of the connector
components. Furthermore, we will illustrate the optical design of
micro-lens arrays and their integration in fiber connectors with
improved tolerances.
A multi-channel free-space micro-optical module for dense MCM-level optical interconnections has been designed and fabricated. Extensive modeling proves that the module is scalable with a potential for multi-Tb/s.cm2 aggregate bit rate capacity while alignment and fabrication tolerances are compatible with present-day mass replication techniques. The micro-optical module is an assembly of refractive lenslet-arrays and a high-quality micro-prism. Both components are prototyped using deep lithography with protons and are monolithically integrated using vacuum casting replication technique. The resulting 16-channel high optical-grade plastic module shows optical transfer efficiencies of 46% and inter-channel cross talks as low as -22 dB, sufficient to establish workable multi-channel MCM-level interconnections. This micro-optical module was used in a feasibility demonstrator to establish intra-chip optical interconnections on a 0.6μm CMOS opto-electronic field programmable gate array. This opto-electronic chip combines fully functional digital logic, driver and receiver circuitry and flip-chipped VCSEL and detector arrays. With this test-vehicle multichannel on-chip data-communication has been achieved for the first time to our knowledge. The bit rate per channel was limited to 10Mb/s because of the limited speed of the chip tester.
In this paper we present Deep Lithography with Protons (DLP) as a promising technology for the fabrication of mechanical fiber alignment structures accurately ordered in massive 2D arrays. The fabrication process consists of irradiating PMMA-resist layers with high-energetic proton beams through a lithographic mask with a well-defined circular shape, followed by a selective development of these irradiated zones. To increase the coupling efficiency, we can additionally integrate uniform spherical micro-lenses created by swelling the proton-bombarded zones in a monomer vapor. We highlight the influence of the etching time, the proton beam intensity and the absorbed doses in the PMMA layers on the diameters of the finally developed alignment holes. While selecting the correct process parameters, we prove DLP to be a suitable technology for the fabrication of circular micro-holes with diameters of 125&mum and 155&mum at the front and the back side of a 500&mum thick PMMA plate respectively. We finally illustrate the potentialities of these type of fiber holding plates to realize a user-friendly and accurate 2D fibre positioning component.
In this paper we present our latest results on the fabrication and characterization of plastic microlenslet arrays using Deep Lithography with Protons (DLP) and highlight their geometrical dimensions, their surface profile and their uniformity. We also present quantitative information on their optical characteristics such as focal length and spherical aberration as measured with a Mach-Zehnder interferometer. Furthermore we demonstrate the flexibility of the DLP technology to fabricate arrays of microlenses that feature different pitches and different sags. Although the DLP technology is a valuable tool to rapidly prototype refractive micro-optical components, the approach is unpractical for mass-fabrication. We therefore introduce a replication technique, called vacuum casting, which is very appropriate when only a few tens of copies have to be made, and we bring forward the first quantitative characteristics of these microlens replicas.
We report on the design, the fabrication, the characterization and the demonstration of scalable multi-channel free-space interconnection components with the potential for Tb/s.cm2 aggregate bit rate capacity over inter-chip interconnection distances. The demonstrator components are fabricated in a high quality optical plastic, PMMA, using an ion-based rapid prototyping technology that we call deep proton lithography. With the presently achieved Gigabit/s data rates for each of the individual 16 channels with a BER smaller than 10(superscript -13 and with inter-channel cross-talk lower than -22dB the module aims at optically interconnecting 2-D opto-electronic VCSEL and receiver arrays, flip-chip mounted on CMOS circuitry. Furthermore, using ray-tracing software and radiometric simulation tools, we perform a sensitivity analysis for misalignment and fabrication errors on these plastic micro-optical modules and we study industrial fabrication and material issues related to the mass-replication of these components through injection-molding techniques. Finally we provide evidence that these components can be mass-fabricated in dedicated, highly-advanced optical plastics at low cost and with the required precision.
We report on the design, the fabrication, the characterization and the demonstration of scalable multi-channel free-space interconnection components with the potential for Tb/s.cm2 aggregate bit rate capacity over inter-chip interconnection distances. The demonstrator components are fabricated in a high quality optical plastic, PMMA, using an ion-based rapid prototyping technology that we call deep proton lithography. With the presently achieved Gigabit/s data rates for each of the individual 16 channels with a BER smaller than 10-13 and with inter-channel cross-talk lower than -22dB the module aims at optically interconnecting 2-D opto-electronic VCSEL and receiver arrays, flip-chip mounted on CMOS circuitry. Furthermore, using ray-tracing software and radiometric simulation tools, we perform a sensitivity analysis for misalignment and fabrication errors on these plastic micro-optical modules and we study industrial fabrication and material issues related to the mass- replication of these components through injection-molding techniques. Finally we provide evidence that these components can be mass-fabricated in dedicated, highly-advanced optical plastics at low cost and with the required precision.
We report on the design, the fabrication, the characterization and the demonstration of a scalable multi- channel free-space interconnection components with the potential for Tb/x.cm2 aggregate bit rate capacity over inter-chip interconnection distances. The demonstrator components are fabricated in a high quality optical plastic, PMMA, using an ion-based rapid prototyping technology that we call deep proton lithography. With the presently achieved Gigabit/s data rates for each of the individual 16 channels with a BER smaller than 10-13 and with inter-channel cross-talk lower than -22dB the module aims at optically interconnecting 2-D opto-electronic VCSEL and receiver arrays, flip-chip mounted on CMOS circuitry. Furthermore, using ray-tracing software and radiometric simulation tools, we perform a sensitivity analysis fo misalignment and fabrication errors on these plastic micro- optical modules and we study industrial fabrication and material issues related to the mass-replication of these components through injection-molding techniques. Finally we provide evidence that these components can be mass- fabricated in dedicated, highly-advanced optical plastics at low cost and with the required precision.
We design and realize a scalable multi-channel free-space interconnection prototype with the potential for Tb/s.cm2 aggregate bit rate capacity over inter- and intra-MCM interconnection distances. The component is prototyped in a high quality optical plastic, PMMA, using deep lithography with protons. At present data communication is achieved at 622 Mb/s per channel with a BER smaller than 10-13 for the 16 channels with inter-channel cross-talks as low as -22dB. We perform a sensitivity analysis for misalignments and study the impact of fabrication errors on the performance of the interconnection module in case injection moulding would be the preferred mass-fabrication technique. We provide evidence that these modules can be mass-fabricated with the required precision in optical plastics suited for heterogeneous integration with semiconductor materials.
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