Dr. Bing Han Profile

Dr. Bing Han

at Univ of Trento

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Publications (1)

Proceedings Article | 10 May 2011 Paper

Development and optical characterization of vertical tapers in SiON waveguides using gray-scale lithography

B. Han, E. Rigo, R. Guider, S. Larcheri, G. Nunzi Conti, M. Vanacharla, A Chiasera, M. Ferrari, L. Pavesi, G. Pucker, G. Righini, M. Ghulinyan

Proceedings Volume 8069, 80690K (2011) https://doi.org/10.1117/12.886820

KEYWORDS: Waveguides, Silicon, Photoresist materials, Refractive index, Lithography, Light wave propagation, Photomasks, Grayscale lithography, Silica, Finite-difference time-domain method

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